Heterodyne interferometer with two spatial-separated polarization beams for nanometrology |
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| Authors: | Wu C-M Lin S-T Fu J |
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| Institution: | (1) Department of Nuclear Science, National Tsing Hua University, Hsinchu, 300, Taiwan;(2) Institute of Opto-Electronic Engineering, Taipei University of Technology, Taipei, 106, Taiwan;(3) Precision Engineering Division, National Institute of Standards & Technology, Gaithersburg, MD 20899, USA |
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| Abstract: | An interferometer having accuracy in displacement measurement of <1 nm is necessary in nanometrology. To meet the requirement, the periodic nonlinearity mainly caused by polarization and frequency mixings should be less than deep sub-nanometer. In this paper, two spatial-separated polarization beams are used to avoid mixings and then the periodic nonlinearity. The developed interferometer demonstrates a periodic nonlinearity of about 25 pm and a 2 pm/ Hz in displacement noise level. |
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| Keywords: | heterodyne interferometer interferometry nanometrology |
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