超声搅拌化学浴沉积法制备大颗粒和致密的CdS薄膜

采用超声搅拌化学浴法(UCBD)在SnO2:F透明导电玻璃衬底上制备了CdS薄膜.研究了退火和CdCl2处理对UCBD-CdS薄膜的表面形貌、晶体结构和直接带隙的影响,比较了沉积时间对UCBD-CdS薄膜中CdS聚集体颗粒大小和堆积致密性的影响.结果表明,CdCl2处理可使CdS聚集体中的小颗粒重新熔合在一起,但CdS聚集体的大小并没有改变.在UCBD-CdS薄膜的沉积过程中,CdS薄膜的横向和纵向生长速率之比会随着沉积时间的不同而改变,且沉积时间是获得大颗粒的CdS聚集体和致密的UCBD-CdS薄膜的重要影响因素.当沉积时间为40min时,获得的UCBD-CdS薄膜较致密,CdS聚集体的大小为180nm,膜厚为80.8nm,适合作为薄膜太阳电池的窗口层.

Preparation of Large Grain and Dense CdS Thin Films Using Ultrasonic Agitation Chemical Bath Deposition

We deposited CdS thin films onto F-doped SnO2 transparent conductive glass by ultrasonicagitation chemical bath deposition (UCBD). The influence of the annealing and CdCl2-treatment on thesurface morphology, crystal structure, and direct band gap of the UCBD-CdS thin films was investigated.The effect of deposition time on the grain size of the CdS aggregates and the stack denseness of theUCBD-CdS thin films was compared. The results reveal that the small grains in the CdS aggregates weremelted together and the CdS aggregate size did not change in the UCBD-CdS thin films after theCdCl2-treatment procedure. It is interesting that the ratio of the horizontal to vertical deposition rate variedwith deposition time over the deposition period of the UCBD-CdS thin films. The deposition time was veryimportant to obtain large CdS aggregate grains and dense UCBD-CdS thin films. Over a deposition time of40 min the resulting UCBD-CdS thin films were dense and had a 180 nm grain size of CdS aggregates anda 80.8 nm of thin film thickness. The large-grained and dense UCBD-CdS thin films were suitable for thinfilm solar cells as a window layer.