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Mechanical and optical properties of CNx films with high N/C ratio |
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| Authors: | M. Jelínek W. Kulisch M.P. Delplancke-Ogletree J. Lancok L. Jastrabík D. Chvostová C. Popov J. Bulír |
| Affiliation: | (1) Institute of Physics ASCR, Na Slovance 2, 18221 Prague 8, Czech Republic, CZ;(2) University of Kassel, Institute of Technical Physics, Heinrich-Plett-Str. 40, 34109 Kassel, Germany, DE;(3) Université Libre de Bruxelles, Dept. of Industrial Chemistry, 50 av. F.D. Rooswelt, B-1050 Brussels, Belgium, BE;(4) Central Laboratory of Photoprocesses, Bulgarian Academy of Sciences, Acad. Georgi Bontchev Str., Bl. 109, 1113 Sofia, Bulgaria, BG |
| Abstract: | Nitrogen-rich carbon nitride films were prepared by three different deposition methods on fused silica, stainless steel and silicon cantilever substrates. Their optical properties were studied by spectroscopic ellipsometry and UV spectrometry. Mechanical properties such as plastic and Vickers microhardness, Young’s modulus, adhesion and film stress were also tested. The results were compared with the properties of films with lower nitrogen concentrations. Received: 26 January 2001 / Accepted: 29 January 2001 / Published online: 3 May 2001 |
| Keywords: | PACS: 81.15.-z 62.20.-x 78.20.-e |
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