| 基于相位恢复的光学元件面形检测技术研究 |
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| 引用本文： | 范琦,王云飞,杨百愚,杨鸿儒,黎高平,姜昌录. 基于相位恢复的光学元件面形检测技术研究[J]. 应用光学, 2015, 36(2): 242-246. DOI: 10.5768/JAO201536.0203001 |
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| 作者姓名： | 范琦 王云飞 杨百愚 杨鸿儒 黎高平 姜昌录 |
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| 作者单位： | 1.空军工程大学 理学院,陕西 西安 710051; |
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| 基金项目： | 陕西省自然科学基金(2010JM8012) |
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| 摘 要： | 利用标量衍射的角谱理论，研究了基于两幅光强分布的相位恢复算法，并将此算法应用到光波的波前及光学元件面形的检测中。实验研究了球面光波波前的相位恢复及面形检测，给出了恢复波前与理想波前之间的偏差，采用求Zernike系数的广义逆矩阵的方法，用程序实现了光学元件面形的Zernike拟合。
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| 关 键 词： | 角谱理论 相位恢复 面形 Zernike拟合 |
Testing optical surface with phase recovery |
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| Fan Qi;Wang Yunfei;Yang Baiyu;Yang Hongru;Li Gaoping;Jiang Changlu. Testing optical surface with phase recovery[J]. Journal of Applied Optics, 2015, 36(2): 242-246. DOI: 10.5768/JAO201536.0203001 |
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| Authors: | Fan Qi Wang Yunfei Yang Baiyu Yang Hongru Li Gaoping Jiang Changlu |
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| Affiliation: | 1.School of Science,Air Force Engineering University,Xi-an 710051,China;2.Xi-an Institute of Applied Optics,Xi-an 710065,China |
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| Abstract: | Using the angular spectrum theory of scalar diffraction, the phase retrieval algorithm with two intensity patterns was carried out, and was used to test the optical surfaces and wavefronts. The wavefronts of the spherical wave surfaces were retrieved by the algorithm in experiment. The algorithm of wavefront fitting based on the Zernike polynomials was realized with computer programmer by calculating generalized inverse matrix of Zernike coefficients. |
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