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Effective modification of MgO with surface transition metal oxides for NF3 decomposition
Authors:Yanan Wang  Xiufeng Xu  Pei Sheng  Hongguang Li  Tingting Wang  Youfen Huang  Fangshu Liu
Institution:School of Chemistry and Chemical Engineering, Yantai University, Yantai 264005, Shandong, China
Abstract:NF3 decomposition over transition metal oxides coated MgO reagents in the absence of water is investigated. The results show that NF3 can be decomposed completely over pure MgO but the time of NF3 steady full conversion kept as short as 80 min, while the reactivities of coated MgO reagents were remarkably enhanced by transition metal oxides, for example the time of NF3 complete conversion over 12%Fe/MgO extended to 380 min. It is suggested that not only an increase in surface area but also a significant enhancement in the fluorination of MgO substrate caused by the surface transition metal oxides result in an improved reactivity of coated MgO reagents for NI3 decomposition.
Keywords:NF3 decomposition  defluorinated reagents  transition metal oxides coated MgO  reactivity
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