光电位置敏感器件的非线性分析及应用

阐述光电位置敏感器件（PSD）的结构、特性和工作原理，并根据PSD的原理和特性分析其产生非线性的几种主要因素。导出PSD的输出信号与光强无关的位置方程。设计出一种低温漂高精度的PSD非线性硬件调制电路。分析了插值算法、神经网络优化法以及解析法等对PSD的非线性进行修正的有效性，并对给出的部分实验数据进行了分析。最后对PSD在光学三角法测量、自动检测以及高精度测量中的应用作了进一步的讨论与展望。

Nonlinearity analysis and application of optoelectronic position sensitive detector

The principle,structure and property of optoelectronic position sensitive detector(PSD) are briefly introduced. The non-linearity caused by PSD is analyzed according to the principle and characteristics of PSD. The location equation of PSD output signal independent of light intensity was derived. PSD nonlinearity modulation circuit was designed to achieve low temperature drift and high precision. The validity of correcting PSD non-linearity with differential algorithm,optimization method of neural network and analytic method is analyzed.Some of the data obtained during the experiment are also analyzed. The prospects of PSD's application in optical trigonometry,automatic check and high-precision measurement are discussed.