| 掠射技术与X射线荧光分析 |
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| 引用本文： | 刘亚雯 肖辉. 掠射技术与X射线荧光分析[J]. 光谱学与光谱分析, 1998, 18(5): 609-613 |
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| 作者姓名： | 刘亚雯 肖辉 |
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| 作者单位： | 中国科学院高能物理研究所 |
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| 摘 要： | 掠射技术引入Ｘ射线荧光分析成为一种新的材料及薄膜分析技术。运用此技术命同材料表面及薄膜的密度、厚度、界面粗糙度、成分的深度和剖面分布等各种信息，本文介绍了掠射技术在Ｘ射线荧光分析中的应用及近年来的发展和前景。
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| 关 键 词： | 掠射 X射线荧光分析 XRF IAD |
GRAZING TECHNIQUES AND X RAY FLUORESCENCE ANALYSIS |
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| Y Liu,H Xiao. GRAZING TECHNIQUES AND X RAY FLUORESCENCE ANALYSIS[J]. Spectroscopy and Spectral Analysis, 1998, 18(5): 609-613 |
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| Authors: | Y Liu H Xiao |
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| Affiliation: | Institute of High Energy Physics, Academia Sinica, 100080 Beijing. |
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| Abstract: | X ray analysis has become a new analysis method of material and thin film.Using this method,we can obtain much information on material such as density,layer thickness,interface roughness and compositional depth profile.Application and development of grazing technique in X ray fluorescence analysis are introduced in this paper. |
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| Keywords: | Grazing X Ray fluorescence |
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