Piranha改性玻璃基板液相沉积制备SrTiO3功能陶瓷薄膜

以Piranha溶液处理玻璃基板,采用液相沉积技术,制备了钛酸锶晶态薄膜。改性基板的亲水性测定与偏光显微镜测试表明,Piranha溶液能够有效改善玻璃基板的亲水性,并且基板表面的硅烷醇对钛酸锶薄膜的沉积具有积极指导作用;X射线衍射(XRD)与扫描电镜(SEM)表征显示,制备成功的钛酸锶薄膜纯度高,结晶良好,样品表面均匀,在垂直基板表面方向上呈纤维花簇状生长。文章同时对基板表面硅烷醇形成过程进行了研究。

Preparation of SrTiO3 Functional Ceramic Thin Film on Glass Wafers Treated by Piranha Solution with Liquid Phase Deposition Method

SrTiO₃ thin film was prepared on glass wafers treated by piranha solution (a mixture of sulfuric acid and hydrogen peroxide) with Liquid Phase Deposition method. Contact angle measurement of glass wafers and photographs of polarizing microscope indicate that hydrophilic characteristic of the substrate is improved by piranha solution, and an induction of deposition SrTiO₃ thin film by Si-OH groups. XRD and SEM results show that the pure and homogeneous SrTiO₃ thin film is a well-crystalline one. The prepared SrTiO₃ thin film is grown vertically on the glass substrate. The formation mechanism of Si-OH groups is also discussed.