| PET柔性衬底上生长绒面ZnO-TCO薄膜及其在薄膜太阳电池中的应用 |
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| 引用本文： | 林泉,陈新亮,倪牮,张德坤,孙建,赵颖,耿新华.PET柔性衬底上生长绒面ZnO-TCO薄膜及其在薄膜太阳电池中的应用[J].光电子．激光,2011(5):714-717. |
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| 作者姓名： | 林泉 陈新亮 倪牮 张德坤 孙建 赵颖 耿新华 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所光电子薄膜器件与技术天津市重点实验室光电信息技术科学教育部重点实验室；;南开大学光电子薄膜器件与技术研究所光电子薄膜器件与技术天津市重点实验室光电信息技术科学教育部重点实验室；;南开大学光电子薄膜器件与技术研究所光电子薄膜器件与技术天津市重点实验室光电信息技术科学教育部重点实验室；;南开大学光电子薄膜器件与技术研究所光电子薄膜器件与技术天津市重点实验室光电信息技术科学教育部重点实验室；;南开大学光电子薄膜器件与技术研究所光电子薄膜器件与技术天津市重点实验室光电信息技术科学教育部重点实验室；;南开大学光电子薄膜器件与技术研究所光电子薄膜器件与技术天津市重点实验室光电信息技术科学教育部重点实验室；;南开大学光电子薄膜器件与技术研究所光电子薄膜器件与技术天津市重点实验室光电信息技术科学教育部重点实验室； |
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| 基金项目： | 国家重点基础研究发展计划资助项目(2011CB201605,2011CB201606&2011CB201607);天津市应用基础及前沿技术研究计划资助项目(09JCYBJC06900);中央高校基本科研业务费专项资金项目(65010341) |
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| 摘 要： | 利用低压金属有机化学气相沉积(LP-MOCVD)技术在PET柔性衬底上低温生长绒面结构ZnO-TCO薄膜,DEZn和H2O作为源材料,B2H6作为掺杂剂.详细研究了薄膜掺杂流量对ZnO薄膜微观结构以及光电性能影响.优化获得的PET/ZnO:B薄膜厚约为1 500nm时,绒面结构PET/ZnO薄膜的方块电阻约为10Ω,可...
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| 关 键 词： | 金属有机化学气相沉积(MOCVD) PET柔性衬底 ZnO-TCO薄膜 薄膜太阳电池 |
Surface textured ZnO-TCO thin films grown on PET flexible substrates and the applications in thin-film solar cells |
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| LIN Quan,CHEN Xin-liang,NI Jian,ZHANG De-kun,SUN Jian,ZHAO Ying and GENG Xin-hua.Surface textured ZnO-TCO thin films grown on PET flexible substrates and the applications in thin-film solar cells[J].Journal of Optoelectronics·laser,2011(5):714-717. |
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| Authors: | LIN Quan CHEN Xin-liang NI Jian ZHANG De-kun SUN Jian ZHAO Ying and GENG Xin-hua |
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| Institution: | Tianjin Key Lab.of Optoelectronic Films and Devices,Key Lab.on Optoelectronic Information Technology of Education Ministry of China,Institute of Optoelectronic Films and Devices,Nankai University,Tianjin 300071,China;Tianjin Key Lab.of Optoelectronic Films and Devices,Key Lab.on Optoelectronic Information Technology of Education Ministry of China,Institute of Optoelectronic Films and Devices,Nankai University,Tianjin 300071,China;Tianjin Key Lab.of Optoelectronic Films and Devices,Key Lab.on Optoelectronic Information Technology of Education Ministry of China,Institute of Optoelectronic Films and Devices,Nankai University,Tianjin 300071,China;Tianjin Key Lab.of Optoelectronic Films and Devices,Key Lab.on Optoelectronic Information Technology of Education Ministry of China,Institute of Optoelectronic Films and Devices,Nankai University,Tianjin 300071,China;Tianjin Key Lab.of Optoelectronic Films and Devices,Key Lab.on Optoelectronic Information Technology of Education Ministry of China,Institute of Optoelectronic Films and Devices,Nankai University,Tianjin 300071,China;Tianjin Key Lab.of Optoelectronic Films and Devices,Key Lab.on Optoelectronic Information Technology of Education Ministry of China,Institute of Optoelectronic Films and Devices,Nankai University,Tianjin 300071,China;Tianjin Key Lab.of Optoelectronic Films and Devices,Key Lab.on Optoelectronic Information Technology of Education Ministry of China,Institute of Optoelectronic Films and Devices,Nankai University,Tianjin 300071,China |
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| Abstract: | The low-pressure metal organic chemical vaper deposition(LP-MOCVD) technique is used to grow textured ZnO-TCO thin films on PET substrates at low temperature.The effects of the B-doping on the microstructure,electrical and optical properties of the ZnO thin films are investivated.Typical PET/ZnO:B films are with thickness of 1 500 nm,sheet resistanceof Rs～10Ω,and average transmittance in the visible and near infrared region of Ta～80%.The textured ZnO-TCO thin films are used in a-Si thin film solar cells and an efficiency of 6.3% is abtained(solar cell structure:PET/ZnO-TCO/pin-a-Si/Al). |
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| Keywords: | metal organic chemical vapor deposition(MOCVD) PET flexible substrates ZnO-TCO thin films thin-film solar cells |
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