Photoinduced phenomena in mAs2S3·nAs2Se3 amorphous films and their application in micro-optics technology

Photoinduced phenomena, such as photodarkening, photorefraction, and photodissolution, were studied in different compositions of three-component mAs₂S₃·nAs₂Se₃ amorphous films. The main emphasis was on the effect of photoinduced change of dissolution rate since this effect is the basis of many applications of amorphous chalcogenide films. The results of the investigation were compared with photoinduced effects in binary As₂S₃ and As₂Se₃ films. Advanced micro-optical devices: micro-lens and micro-mirror arrays, diffractive gratings, and photonic bandgap crystals, based on three-component amorphous films which possessed optimal photodissolution characteristics were developed. The primary parameters of the micro-optical devices developed are discussed.