Stress-induced large-area lift-off of crystalline Si films |
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Authors: | F Dross J Robbelein B Vandevelde E Van Kerschaver I Gordon G Beaucarne J Poortmans |
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Institution: | (1) IMEC v.z.w., Kapeldreef 75, 3001 Leuven, Belgium |
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Abstract: | A new implantation-free lift-off process is presented. We deposit a layer with mismatched thermal expansion coefficient with
respect to the substrate. Upon cooling, the differential contraction induces a large stress field which is released by the
initiation and the propagation of a crack parallel to the surface. The principle is demonstrated on both single and multi-crystalline
silicon. Films with an area of 25 cm2 and a thickness of 30–50 μm have been obtained. Some Si layers were further processed into solar cells. An energy conversion
efficiency of 9.9% was reached on a 1 cm2 sample.
PACS 62.20.Mk; 68.55.Jk; 68.60.Bs; 84.60.Jt |
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Keywords: | |
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