| 考虑光学邻近效应的详细布线算法 |
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| 引用本文： | 周强,蔡懿慈,张为,洪先龙.考虑光学邻近效应的详细布线算法[J].半导体学报,2007,28(2):189-195. |
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| 作者姓名： | 周强 蔡懿慈 张为 洪先龙 |
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| 作者单位： | 清华大学计算机科学与技术系，北京 100084;清华大学计算机科学与技术系，北京 100084;清华大学计算机科学与技术系，北京 100084;清华大学计算机科学与技术系，北京 100084 |
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| 摘 要： | 提出了一种考虑光学邻近效应的详细布线算法.该算法在布线过程中,充分考虑了线网走线相对位置及布线线形对其光学邻近效应的影响,通过相应的光刻模拟模型定义了用于估计光学邻近效应(optical proximity effect,OPE)的OPE费用函数,并采用OPE费用阈值控制Steiner树的生长方向和走线路径的选择,同时兼顾线网长度.为提高算法效率,避免布线过程中反复调用光学模拟程序带来的算法运行速度慢的问题,对可能的走线模式建立了计算OPE费用所需的光强查找表格,使算法的运行速度大大提高.在实际的工业用例上的实验结果表明,本文所提出的详细布线算法使布线结果中的OPE问题得到很大程度的改善,有利于后处理过程中的光学邻近效应校正技术的运用,算法的运行时间是可以接受的.
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| 关 键 词： | 光学邻近效应校正 详细布线 Steiner树 成品率 optical proximity effect detailed routing Steiner tree yield |
| 文章编号： | 0253-4177(2007)02-0189-07 |
| 修稿时间： | 07 19 2006 12:00AM |
Detailed Routing Algorithm with Optical Proximity Effects Constraint |
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| Zhou Qiang,Cai Yici,Zhang Wei and Hong Xianlong.Detailed Routing Algorithm with Optical Proximity Effects Constraint[J].Chinese Journal of Semiconductors,2007,28(2):189-195. |
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| Authors: | Zhou Qiang Cai Yici Zhang Wei and Hong Xianlong |
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| Institution: | Department of Computer Science and Technology,Tsinghua University,Beijing 100084,China;Department of Computer Science and Technology,Tsinghua University,Beijing 100084,China;Department of Computer Science and Technology,Tsinghua University,Beijing 100084,China;Department of Computer Science and Technology,Tsinghua University,Beijing 100084,China |
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| Abstract: | We present a detailed routing algorithm considering the optical proximity effect.The light intensity is calculated beforehand and stored in look-up tables.These costs are used as a constraint to guide the sequential routing.The routing algorithm is based on constructed force directed Steiner tree routing to enhance routing efficiency.Experimental results on industrial benchmark circuits show that the presented routing algorithm can obtain much improvement considering optical effects short runtime. |
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| Keywords: | optical proximity effect detailed routing Steiner tree yield |
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