Method for modifying the structure and elemental composition of the solid surface during a high-voltage vacuum discharge |
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Authors: | S M Lupekhin A A Ibragimov |
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Institution: | 1. Bonch-Bruevich State University of Telecommunication, St. Petersburg, 191186, Russia
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Abstract: | A new method for modifying the surface of a solid, which makes it possible to change effectively the structure and elemental composition of the surface with a high precision, is developed and tested experimentally. The method is based on the action of the plasma of a pulsed high-voltage vacuum discharge, the ion beam from the plasma, and the electron beam on a solid target. The emission and plasma parameters are observed in a pulsed electric field produced in the diode system to which a pulsed voltage with an amplitude of ~103–105 V and a duration from 10?9 to 10?5 s is applied. |
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