Study on actuating voltage and switching time of a MOEMS optical switch

The micro-opto-electro-mechanical systems (MOEMS) optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Based on the torsion dynamics theory, the technique and relative formula are presented for the first time for analyzing the actuating voltage and the switch time. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). Finally, the difference between the experimental results and theoretical data is discussed.