Recent progress and perspectives of metal oxides based on-chip microsupercapacitors

The rapid development of portable electronic devices has accelerated the advancement of energy storage devices. On-chip microsupercapacitors (MSCs), as a group of high performance energy storage devices, have remarkable features of miniaturization, high security, and easy integration to build an all-in-one integrated system to meet the request of micro-portable electronic equipments. With the characteristics of high capacities, environmentally friendly and low cost, metal oxides are thought to be ideal candidates for on-chip MSCs. This paper summarizes the recent progress of metal oxides based on-chip MSCs. It starts with the introduction of several common methods for the synthesis of metal oxides nanostructures. The recent developments on the fabrication and electrochemical performance of metal oxides based on-chip MSCs are then highlighted in detail. Finally, the existing challenges and future perspectives of the on-chip MSCs are discussed.