Fabrication of Channel Waveguides by Photochemical Self-Developing in Doped Sol-Gel Hybrid Glass

Sol-gel derived inorganic-organic hybrid glass (HYBRIMER) films doped with benzildimethylketal (BDK) were prepared. Refractive index and film thickness increase by UV exposure due to photoinduced polymerization and photolocking of high refractive index BDK. This enables the channel waveguides in HYBRIMER film to be fabricated without using a developing process, which is called photochemical self-developing (PSD). The waveguides consist of three layers with under-cladding and over-cladding of undoped HYBRIMER films and core of BDK-doped HYBRIMER film. A 1 × 4 splitter of waveguides was fabricated and demonstrated.