| 气氛对铁电Pb(Zr_(0.52)Ti_(0.48)O_3薄膜特性的影响 |
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| 引用本文： | 陶向明,许宇庆,叶高翔,张其瑞,陶向明.气氛对铁电Pb(Zr_(0.52)Ti_(0.48)O_3薄膜特性的影响[J].浙江大学学报(理学版),1995(Z1). |
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| 作者姓名： | 陶向明 许宇庆 叶高翔 张其瑞 陶向明 |
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| 作者单位： | 浙江大学物理系!310027(陶向明，许宇庆，叶高翔，张其瑞)，杭州大学物理系(陶向明) |
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| 摘 要： | 本文着重研究了气氛对薄膜结晶性能、铁电性能的影响.结果发现,气体浓度对材料的结晶性以及铁电性能都有明显的影响.当Ar/O_2(mol)为2时,Pb(Zr_(0.52)Ti_(0.48))O_3薄膜为单相钙钛矿结构,而且所制得的薄膜的剩余极化P_r、饱和极化P_s以及介电常数最大.
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| 关 键 词： | 薄膜 铁电性 气氛 |
The Influence of Atmosphere on TheProperties of FerroelectricPb(Zr_(0.52)Ti_(0.48))O_3 Films |
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| Tao Xiangming Xu Yuqing Ye Gaoxiang Zhang Qirui.The Influence of Atmosphere on TheProperties of FerroelectricPb(Zr_(0.52)Ti_(0.48))O_3 Films[J].Journal of Zhejiang University(Sciences Edition),1995(Z1). |
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| Authors: | Tao Xiangming Xu Yuqing Ye Gaoxiang Zhang Qirui |
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| Abstract: | The studies of PZT ferroelectric films deposited by magnetron sputting are reported in this paper. Its phase structure, ferroelectric properties are investigated. It is found that the PZT ferroelectric films only consist of pervoskite phase when Ar/O2 is 2. However, when Ar/O2 is 2, the remnant polarization, saturation polarization and dielectric constant of the film are the biggest. |
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| Keywords: | films ferroelectric properties atmosphere |
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