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A percolation study of RTS noise in deep sub-micron MOSFET by Monte Carlo simulation
引用本文:马仲发,庄奕琪,杜磊,魏珊. A percolation study of RTS noise in deep sub-micron MOSFET by Monte Carlo simulation[J]. 中国物理, 2005, 14(4): 808-811
作者姓名:马仲发  庄奕琪  杜磊  魏珊
作者单位:Institute of Microelectronics Key Laboratory of Ministry of Education for Wide Band-gap Semiconductor Materials and Devices, Xidian University, Xi'an,710071, China;Institute of Microelectronics Key Laboratory of Ministry of Education for Wide Band-gap Semiconductor Materials and Devices, Xidian University, Xi'an,710071, China;Institute of Microelectronics Key Laboratory of Ministry of Education for Wide Band-gap Semiconductor Materials and Devices, Xidian University, Xi'an,710071, China;Institute of Microelectronics Key Laboratory of Ministry of Education for Wide Band-gap Semiconductor Materials and Devices, Xidian University, Xi'an,710071, China
基金项目:Project supported by the National Natural Science Foundation of China (Grant No 60276028), the National Defence Foundation (Grant No 51411040601DZ014) and the Key lab Foundation of National Defence Science $&$ Technology (Grant No 51433030103DZ01)
摘    要:Based on percolation theory and random telegraph signal (RTS) noise generation mechanism, a numerical model for RTS in deep submicron metal-oxide-semiconductor field-effect transistor (MOSFET) was presented, with which the dependence of Tc/Te (where Tc=capture time, Te=emission period ) on energy levels and trap depth with respect to the interface of traps can be simulated. Compared with experimental results, the simulated ones showed a good qualitative agreement.

关 键 词:过滤研究 随机电报信号噪声 衰退机制 数学模型 金属-氧化物-半导体场效应晶体管
收稿时间:2004-08-18

A percolation study of RTS noise in deep sub-micron MOSFET by Monte Carlo simulation
Ma Zhong-F,Zhuang Yi-Qi,Du Lei and Wei Shan. A percolation study of RTS noise in deep sub-micron MOSFET by Monte Carlo simulation[J]. Chinese Physics, 2005, 14(4): 808-811
Authors:Ma Zhong-F  Zhuang Yi-Qi  Du Lei  Wei Shan
Affiliation:Institute of Microelectronics Key Laboratory of Ministry of Education for Wide Band-gap Semiconductor Materials and Devices, Xidian University, Xi'an,710071, China
Abstract:Based on percolation theory and random telegraph signal (RTS) noise generation mechanism, a numerical model for RTS in deep submicron metal-oxide-semiconductor field-effect transistor (MOSFET) was presented,with which the dependence of ${tau_{rm c} }/ {tau_e }$ (where $tau_{rm c} $=capture time, $tau_e$=emission period ) on energy levels and trap depth with respect to the interface of traps can be simulated. Compared with experimental results, the simulated ones showed a good qualitative agreement.
Keywords:MOSFET   RTS noise   ${tau_{rm c} }/{tau_e}$   percolation   model
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