干涉测量圆柱外表面的误差分析

使用一个特殊圆台面反射镜，在Fizeau（菲索）干涉仪系统中，可实现对圆柱外表面粗糙度的一次性测量。但反射镜与待检测圆柱的空间相对位置很难精准确定，因而会引入测量失调误差，影响测量结果的精度。为了便于剔除误差，要对误差的类型以及产生原因做具体分析。研究光线传播轨迹并建立数学模型，在圆柱坐标系下求解得到偏移失调误差、旋转失调误差、加工角度误差与测量光程差的关系式。使用Matlab软件仿真，绘制出3种失调误差对应的干涉条纹。分析引入误差的干涉条纹，对比实验测量结果，减小误差对测量结果的影响，得到圆柱外表面的形貌信息。

Misalignment analysis of cylindrical outer surfaces in interferometric measurement

A special round reflector can be used in the Fizeau interfermeter system to achieve the one-time measurement of the cylindrical outer surfaces roughness. However, the relative spatial position of the reflector and the cylinder to be tested is difficult to accurately determine, so the measurement misalignment error will be introduced, which will affect the accuracy of the measurement results. In order to eliminate the errors, the types of errors and causes should be concretely analyzed. The light propagation path was studied, and the mathematical model was established. In cylindrical coordinate system, the relations of offset misalignment error, rotation misalignment error, processing angle error and measurement of the optical path difference were obtained. The Matlab software was used for simulation, and the interference fringes corresponding to the three kinds of misalignment errors were plotted. The interference fringes with errors introduced were analyzed, and the experimental results were compared to reduce the effect of error on measurement results. Finally, the morphology information of the cylindrical outer surfaces was obtained.