基于无衍射光莫尔条纹的轴锥透镜锥角测量方法 |
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引用本文: | 杨练根,刘凡,冉晶晶,翟中生. 基于无衍射光莫尔条纹的轴锥透镜锥角测量方法[J]. 应用光学, 2020, 41(3): 559-564. DOI: 10.5768/JAO202041.0303003 |
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作者姓名: | 杨练根 刘凡 冉晶晶 翟中生 |
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作者单位: | 1.湖北工业大学 机械工程学院,湖北 武汉 430068 |
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基金项目: | 精密测试技术及仪器国家重点实验室开放基金资助项目(PIL1602) |
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摘 要: | 为了准确地测量轴锥透镜锥角值,根据无衍射光同心圆环间距不随距离改变的特点和莫尔条纹放大的特性,提出了一种基于无衍射光莫尔条纹的轴锥透镜锥角的测量方法。当无衍射光束经分束器分光合束后形成莫尔条纹,平移其中一束光在图像传感器上的位置,实现莫尔条纹数量的变化,通过记录不同莫尔条纹下的中心距离计算出轴锥透镜锥角。实验以锥角为0.5°的轴锥透镜作为被测对象,与CMM测量结果进行比较,该文提出的方法相对测量误差近似为0.54%,重复性为0.86″,验证了该文方法测量轴锥透镜锥角的可行性。
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关 键 词: | 轴锥透镜 锥角测量方法 无衍射光 莫尔条纹 |
收稿时间: | 2019-09-04 |
Measurement method of axicon cone angle based on moire fringes of non-diffracting beam |
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Affiliation: | 1.School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China2.Hubei Provincial Key Laboratory of Modern Manufacturing and Quality Engineering, Wuhan 430068, China |
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Abstract: | In order to accurately measure the cone angle of an axicon, according to the characteristic that the spacing of the non-diffracting beam concentric annulus did not change with the distance and the amplification characteristic of the moire fringes, a measurement method of the axicon cone angle based on moire fringes of the non-diffracting beam was proposed. When the non-diffracting beams were split and combined by the beam splitter, the moire fringes were formed. Translating the position of one of the beams on the image sensor to realize the change of the moire fringes number, and according to record the center distance under different moire fringes, the axicon cone angle was calculated. The axicon with a cone angle of 0.5° was used as the measured object. Compared with the CMM measurement results, the relative measurement error of the proposed method is approximately 0.54%, and the repeatability is 0.86″, which verify the feasibility of the proposed measurement method of axicon cone angle. |
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