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应用波像差理论计算Kirkpatrick-Baez系统的调制传递函数
引用本文:余承昊,吕丽军.应用波像差理论计算Kirkpatrick-Baez系统的调制传递函数[J].应用光学,2020,41(5):904-910.
作者姓名:余承昊  吕丽军
作者单位:上海大学 精密仪器及机械系,上海 200072
基金项目:国家自然科学基金(61975111)
摘    要:调制传递函数(modulation transfer function,MTF)曲线可以客观地评价光学系统的成像性能。基于平面对称光学系统的波像差理论,给出了Kirkpatrick-Baez(KB)显微镜光学系统主要像差的波像差计算表达式,采用自相关法,通过Gauss-Legendre数值积分求解并绘制了KB系统的MTF曲线,且与光学分析软件的MTF曲线进行对比。结果表明:应用波像差理论计算调制传递函数不仅可以定量直观地分析KB系统的成像性能,而且能进一步解析光学系统的单项像差分布情况,提供更具针对性的系统优化方案。

关 键 词:调制传递函数    波像差理论    Kirkpatrick-Baez系统
收稿时间:2019-12-30

Calculating MTF of Kirkpatrick-Baez system by wave aberration theory
Institution:Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, China
Abstract:The modulation transfer function(MTF) can objectively evaluate the imaging performance of optical system. Based on the theory of wave aberration of plane symmetric optical system, the wave aberration expression of main aberration of Kirkpatrick-Baez(KB) microscope optical system was given. By using the autocorrelation method, the MTF curve of the KB system was obtained by the Gauss-Legendre numerical integration, and then compared with the MTF curve of the optical analysis software. The results show that calculating the MTF by wave aberration theory can not only quantificationally and intuitively analyze the imaging performance of KB system, but further analyze the single aberration distribution of optical system. The application of this theory can provide a more effective targeted optimization scheme for KB system.
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