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全光学非破坏微波场分布成像
引用本文:刘 颖,董明明,胡振忠,杨 博,杜关祥.全光学非破坏微波场分布成像[J].微波学报,2019,35(4):86-91.
作者姓名:刘 颖  董明明  胡振忠  杨 博  杜关祥
作者单位:南京邮电大学通信与信息工程学院,南京210000
摘    要:随着技术的进步,微波集成电路的复杂度和集成度都在不断提高,并且其特征线宽也在不断减小,因此非破坏高分辨微波场近场成像技术对芯片的功能和失效分析至关重要,目前尚没有成熟的技术路线。文章提出了一种基于金刚石氮空位色心的固态量子体系作为传感单元,通过分析色心基态自旋在共振微波场中的量子态演化规律,采用全光学的方法,获得微波场分布的一种精密测量方法。该方法通过搭建光学成像系统进行一次宽场成像来获得芯片整体的微波场分布,具有高效、对近场干扰小等优点,有望在芯片电磁兼容测试、微波芯片失效分析和天线近场分布成像等应用上提供一种全新的测量方案。

关 键 词:金刚石氮空位色心    微波场    单片微波集成电路芯片    空间分辨率

All-Optical Non-destructive Microwave Field Distribution Imaging
LIU Ying,DONG Ming-ming,HU Zhen-zhong,YANG Bo,DU Guan-xiang.All-Optical Non-destructive Microwave Field Distribution Imaging[J].Journal of Microwaves,2019,35(4):86-91.
Authors:LIU Ying  DONG Ming-ming  HU Zhen-zhong  YANG Bo  DU Guan-xiang
Institution:College of Communication and Information Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210000, China
Abstract:The complexity and integration of microwave integrated circuits continue to increase, and the feature line width is continuously decreasing. Non-destructive high-resolution microwave field near-field imaging technology is critical to the function and failure analysis of the chip. There is no mature technical route yet. In this paper, a solid-state quantum system based on diamond nitrogen vacancy(NV) color center is proposed as a sensing unit. By analyzing the quantum state evolution law of the spin state ground state spin in the resonant microwave(MW) field, the all-optical method is used to obtain the precise measurement of the microwave field. Build an optical imaging system, one imaging, to obtain the overall field distribution of the chip. This method is highly efficient and has very little interference to the near field. It is expected to provide a new solution for applications such as chip electromagnetic compatibility, microwave chip failure analysis and antenna near field distribution imaging.
Keywords:diamond NV color center  microwave field  MMIC chip  spatial resolution
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