Fabrication of a mid-IR wire-grid polarizer by direct imprinting on chalcogenide glass |
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Authors: | Yamada Itsunari Yamashita Naoto Tani Kunihiko Einishi Toshihiko Saito Mitsunori Fukumi Kouhei Nishii Junji |
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Affiliation: | Department of Electronic Systems Engineering School of Engineering, the University of Shiga Prefecture, Hikone, Shiga, 522-8533, Japan. yamada.i@e.usp.ac.jp |
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Abstract: | A mid-IR wire-grid polarizer with a 500 nm pitch was fabricated on a low toxic chalcogenide glass (Sb-Ge-Sn-S system) by the thermal imprinting of periodic grating followed by the thermal evaporation of Al metal. After imprinting, deposition of Al on the grating at an oblique angle produced a wire-grid polarizer. The fabricated polarizer showed polarization with TM transmittance greater than 60% at 5-9 μm wavelengths and an extinction ratio greater than 20 dB at 3.5-11 μm wavelengths. This polarizer with a high extinction ratio can be fabricated more simply and less expensively than conventional IR polarizers. |
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