| 低噪声超导量子干涉器件磁强计设计与制备 |
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| 引用本文： | 韩昊轩,张国峰,张雪,梁恬恬,应利良,王永良,彭炜,王镇.低噪声超导量子干涉器件磁强计设计与制备[J].物理学报,2019(13):295-300. |
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| 作者姓名： | 韩昊轩 张国峰 张雪 梁恬恬 应利良 王永良 彭炜 王镇 |
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| 作者单位： | 中国科学院上海微系统与信息技术研究所;中国科学院超导电子学卓越创新中心;中国科学院大学 |
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| 摘 要： | 超导量子干涉器件(superconducting quantum interference device,SQUID)作为一种极灵敏的磁通传感器,在生物磁探测、低场核磁共振、地球物理等领域得到广泛应用.本文介绍了一种基于SQUID的高灵敏度磁强计,由SQUID和一组磁通变压器组成.SQUID采用一阶梯度构型,增强其抗干扰性.磁通变压器由多匝螺旋的输入线圈和大尺寸单匝探测线圈组成,其中输入线圈与SQUID通过互感进行磁通耦合.利用自主工艺平台,在4英寸硅衬底上完成了基于Nb/Al-AlOx/Nb约瑟夫森隧道结的SQUID磁强计制备.低温测试结果显示,该磁强计磁场灵敏度为0.36 nT/Ф0,白噪声段磁通噪声为8μФ0/√Hz,等效磁场噪声为2.88 fT/√Hz.
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| 关 键 词： | 超导量子干涉器件 磁强计 磁通噪声 |
Design and fabrication of low-noise superconducting quantum interference device magnetometer |
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| Han Hao -Xuan,Zhang Guo -Feng,Zhang Xue,Liang Tian -Tian,Ying Li -Liang,Wang Yong -Liang,Peng Wei,Wang Zhen.Design and fabrication of low-noise superconducting quantum interference device magnetometer[J].Acta Physica Sinica,2019(13):295-300. |
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| Authors: | Han Hao -Xuan Zhang Guo -Feng Zhang Xue Liang Tian -Tian Ying Li -Liang Wang Yong -Liang Peng Wei Wang Zhen |
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| Institution: | (State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;Chinese Academy of Sciences,Center for Excellence in Superconducting Electronics,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China) |
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| Abstract: | Han Hao -Xuan;Zhang Guo -Feng;Zhang Xue;Liang Tian -Tian;Ying Li -Liang;Wang Yong -Liang;Peng Wei;Wang Zhen(State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;Chinese Academy of Sciences,Center for Excellence in Superconducting Electronics,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China) |
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| Keywords: | superconducting quantum interference device magnetometer flux noise |
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