Ion-beam analysis of the structure and composition of nanocomposite nc-TiC/a-C:H coatings |
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| Authors: | N G Chechenin P N Chernykh V S Kulikauskas Y Pei D Vainstein J Th M de Hosson |
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| Institution: | (1) Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Leninskie gory, Moscow, 119991, Russia;(2) Materials Science Center, University of Groningen, The Netherlands |
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| Abstract: | The structure and composition of nanocomposite nc-TiC/a-C:H thin films prepared by closed-field unbalanced reactive magnetron sputtering in an argon-acetylene atmosphere have been investigated. The concentrations of carbon and heavier elements have been obtained by Rutherford backscattering and nuclear backscattering. The hydrogen concentration in the films has been determined by elastic recoil detection analysis. Based on the data obtained, a scheme has been proposed to evaluate the C:H matrix mass density and the sp 3 and sp 2 fractions in the matrix. |
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