A study of the effect of different catalysts for the efficient CVD growth of carbon nanotubes on silicon substrates

We report on the identification of efficient combinations of catalyst, carbon feedstock, and temperature for the ethanol chemical vapour deposition (CVD) growth of single-wall carbon nanotubes (SWCNTs) onto silicon substrates.Different catalyst preparations, based on organometallic salts (Co, Fe, Mo, Ni acetate, and bimetallic mixtures), have been spin coated onto thermally grown silicon dioxide on silicon chips to perform tests in a temperature range between 500 and 900 °C.The samples have been then characterized by Raman spectroscopy, atomic force microscopy, scanning electron microscopy, and transmission electron microscopy. Assuming the growth of high-quality isolated nanotubes as target, the ratio in Raman spectra between the intensity of the G peak and of the D peak has been used as the main parameter to evaluate the performance of the catalytic process. A comparison made for both single metals and bimetallic mixtures points out best conditions to achieve efficient CVD growth of SWCNTs.