Eine neue Methode zur Bestimmung der Rauhigkeitsautokorrelationsfunktion von optischen Oberflächen

A New Method of Determining the Autocorrelation Function of Polished Optical Surfaces Starting with a general theory of light scattering a measuring procedure for determining the autocorrelation function of surface roughness of well polished substrates is deduced. In this method light intensity scattered into a fixed direction has to be measured in dependence on the dimensions of the scattering area. The results are tested for a glass surface polished by different methods.