| 微笔直写成型聚酰亚胺图形工艺研究 |
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| 引用本文： | 曹宇,王小叶,周良文,金曦,曾晓雁. 微笔直写成型聚酰亚胺图形工艺研究[J]. 高分子学报, 2009, 0(5): 489-492. DOI: 10.3724/SP.J.1105.2009.00489 |
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| 作者姓名： | 曹宇 王小叶 周良文 金曦 曾晓雁 |
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| 作者单位： | 华中科技大学光电子科学与工程学院,武汉光电国家实验室,武汉,430074 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划) |
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| 摘 要： | 选用均苯四甲酸二酐(PMDA)、4,4′-二氨基二苯醚(ODA)为单体,通过低温缩聚反应制备了PMDA-ODA型聚酰胺酸溶液,通过调节其黏度特性使之适合于微笔直写沉积工艺.采用微笔直写沉积PAA溶液和热亚胺化处理两步法制作出PI图形,并通过Au/PI微桥阵列结构实例显示了该工艺在MEMS聚合物牺牲层或结构层制造领域的应用潜力.
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| 关 键 词： | 微笔 直写成型 聚酰胺酸 聚酰亚胺 微机电系统 |
| 收稿时间： | 2008-09-26 |
STUDY ON MICROPEN DIRECT-WRITE DEPOSITION OF POLYIMIDE PATTERNS |
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| CAO Yu,WANG Xiaoye,ZHOU Liangwen,JIN Xi,ZENG Xiaoyan. STUDY ON MICROPEN DIRECT-WRITE DEPOSITION OF POLYIMIDE PATTERNS[J]. Acta Polymerica Sinica, 2009, 0(5): 489-492. DOI: 10.3724/SP.J.1105.2009.00489 |
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| Authors: | CAO Yu WANG Xiaoye ZHOU Liangwen JIN Xi ZENG Xiaoyan |
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| Affiliation: | School of optoelectronics science and engineering;Wuhan National Laboratory for Optoelectronics;Huazhong University of Science and Technology;Wuhan 430074 |
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| Abstract: | Compared to the traditional lithographic-based techniques for fabricating polyimide patterns,micropen direct-write deposition technique has many advantages such as simple,low-cost,maskless,flexible,etc.The poly-(amic acid)(PAA)solution was synthesized based on the PMDA and ODA in DMAc solvent by the low temperature solution co-polymerization method,and viscosity of the PMDA-ODA PAA solution was adjusted to make it suitable for the micropen direct-write depositing process.Polyimide patterns are fabricated by... |
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| Keywords: | Micropen Direct-write deposition PAA Polyimide MEMS |
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