Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation |
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Authors: | Mordovanakis Aghapi G Hou Kai-Chung Chang Yu-Chung Cheng Ming-Yuan Nees John Hou Bixue Maksimchuk Anatoly Mourou Gerard Galvanauskas Almantas Lafontaine Bruno |
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Institution: | Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, Michigan 48109, USA. amordova@umich.edu |
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Abstract: | Efficient generation of extreme UV (EUV) light at lambda = 13.5 nm from a bulk Sn target has been demonstrated by using a fiber laser. The conversion efficiency from the 1064 nm IR to the EUV was measured to be around 0.9% into 2pi steradians within a 2% bandwidth. To the best of our knowledge, this is the first time an all-fiber system was used to generate EUV or soft x rays. |
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