Micromechanics of substrate-supported thin films |
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| Authors: | Wei He Meidong Han Shibin Wang Lin-An Li Xiuli Xue |
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| Affiliation: | 1.Department of Mechanics,Tianjin University,Tianjin,China;2.Department of Engineering Mechanics,Hunan University of Science and Technology,Xiangtan,China |
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| Abstract: | The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics. This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the experimental characterization techniques, such as the rule of mixture and X-ray tensile testing. In particular, the determination of interfacial adhesion energy, film deformation, elastic properties and Bauschinger effect are discussed. |
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