| 直流电弧等离子体射流CVD制备多种碳膜 |
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| 引用本文： | 张建平 袁定朴. 直流电弧等离子体射流CVD制备多种碳膜[J]. 核聚变与等离子体物理, 1993, 13(4): 55-60 |
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| 作者姓名： | 张建平 袁定朴 |
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| 作者单位： | 中国科学院物理研究所，中国科学院物理研究所，中国科学院物理研究所，中国科学院物理研究所 北京1000803 中国科学院生物物理研究所，100101，北京1000803，北京1000803，北京1000803 |
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| 摘 要： | 本文报道了在同一直流电弧等离子体射流ＣＶＤ装置上，采用不同的沉积条件高速合成金刚石，类金刚石，高取向热解石墨以及无定形碳等四种碳膜。经Ｘ射线衍射（ＸＲＤ），拉曼散射谱（Ｒａｍａｎ），扫描电镜（ＳＥＭ）形貌分析以及显微硬度测试表明，该方法制得的金刚石膜和高取向热解石墨膜具有很高的纯度和良好的晶性，类金刚石具有独特的形貌和Ｒａｍａｎ散射特征以及可与金刚石膜比拟的硬度。
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| 关 键 词： | 等离子体射流 气相沉积 碳膜 薄膜 |
CARBON FILMS PREPARED BY D. C. ARC PLASMA JET CVD |
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| Zhang Jianping Yuan Dingpu Weng Yuxiang Xu Jiren. CARBON FILMS PREPARED BY D. C. ARC PLASMA JET CVD[J]. Nuclear Fusion and Plasma Physics, 1993, 13(4): 55-60 |
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| Authors: | Zhang Jianping Yuan Dingpu Weng Yuxiang Xu Jiren |
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| Abstract: | Four kinds of carbon films namely the diamond, diamond-like (DLF), highly oriented pyrolytic graphite (HOPG) and glassy carbon (GO films were synthesized with high growth rate in a D. C. are plasma jet CVD apparatus. The products were characterized and evaluated by X-ray diffraction,Raman scattering,SEM morphology and micro-hardness tests,Diamond films and HOPG films synthesized using this method possess highly preferred orientation as well as good crystallization,the DLF has unique morphological features and Raman spectrum characteristics,and its micro-hardness could compare with that of diamond films. |
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| Keywords: | Plasma assisted CVD Diamond films Diamond-like films Highly oriented pyrolytic graphite films Glassy carbon films |
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