Z轴硅微机械陀螺仪的机电接口模型分析

为提高z轴硅微机械陀螺仪信噪比，分析了陀螺仪机电接口中的电容和电阻。文中以z轴硅微机械陀螺仪的理论模型为对象，建立了陀螺仪机电接口模型，分析了模型中寄生电容和电阻对有用信号和噪声的影响。分析结果表明：寄生电容会削弱有用信号，且布线与活动结构间的电容对输出有很大的影响，而寄生电阻会产生噪声。最后，提出了采用新工艺和合理的布线方法以减小寄生电容和电阻，从而提高信噪比。

Analyses on Electromechanical Interface Model of Z-Input Silicon Micromachined Gyroscope

The capacitances and resistances of electromechanical interface of SMG are analyzed in order to increase the Signal Noise Ratio(SNR).The electromechanical interface model of the structure of Z-input silicon micromachined gyroscope is established.The impacts of these parasitic capacitances and resistances on output signal are analyzed and simulated with the simulation software of circuit.The analytic results indicate that the parasitic capacitances decrease the output signal and disposal wires on the substrate have made great impact on output signal,and the resistances cause output noise.At last,some methods are put forward to decrease the parasitic capacitances and the resistances,which are the adoption of SOI craftwork and reasonable disposal wires.