Diffusion of iron in lithium niobate: a secondary ion mass spectrometry study

Iron-doped X-cut lithium niobate crystals were prepared by means of thermal diffusion from thin film varying in a systematic way the process parameters such as temperature and diffusion duration. Secondary Ion Mass Spectrometry was exploited to characterize the iron in-depth profiles. The evolution of the composition of the Fe thin film in the range between 600°C and 800°C was studied, and the diffusion coefficient at different temperatures in the range between 900°C and 1050°C and the activation energy of the diffusion process were estimated.