On the semiclassical approach to the ionization process during sputtering |
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| Authors: | J Zavadil |
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| Institution: | Institute of Radio Engineering and Electronics, Czechoslovak Academy of Sciences, Lumumbova I, 182 51 Praha 8, Czechoslovakia |
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| Abstract: | The semiclassical “rate equation” approach to the ionization process during sputtering is shown to be the correct one in the limit of high temperatures. Specifically we show that simple “ rate equation” represents a high temperature asymptotic form of the equation of motion for the occupation number 〈na(t)〉 of relevant valence level of the sputtered particle. |
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