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Decomposition and polymerization of silicon tetrachloride in a microwave plasma. A mass-spectrometry investigation |
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| Authors: | R Manory A Grill U Carmi R Avni |
| Institution: | 1. Materials Engineering Department, Ben-Gurion University of the Negev, P.O.B. 653, 84105, Beer-Sheva, Israel 2. Nuclear Research Center-Negev, P.O.B. 9001, 84190, Beer-Sheva, Israel |
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