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Excimer-laser-induced ablation of the high-T c superconductor Bi-Ca-Sr-Cu-O
Authors:R Kullmer  D Bäuerle
Institution:(1) Angewandte Physik, Johannes-Kepler-Universität, A-4040 Linz, Austria
Abstract:The ablation of ceramic Bi-Ca-Sr-Cu-O by XeCl-excimer-laser projection has been investigated. In both air and vacuum, etching commences at about 2.4 J/cm2 and then increases with fluence within the regime investigated (PHgr <) 20 J/cm2). At 10 J/cm2 the respective etch rates are around 1 mgrm/pulse and 1.6 mgrm/pulse.
Keywords:42  60  74  82  65
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