| 氮化铝陶瓷材料 |
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| 引用本文： | 黄岸兵,崔嵩.氮化铝陶瓷材料[J].微电子技术,1999(2). |
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| 作者姓名： | 黄岸兵 崔嵩 |
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| 作者单位： | 合肥信息产业部43所!合肥，230031 |
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| 摘 要： | 本文介绍了AIN陶瓷基片生产的关键技术，国内外AIN陶瓷封装概况。探讨了AIN陶瓷封装发展的趋势。
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| 关 键 词： | AIN 生产技术 陶瓷封装 |
Aluminum Nitride Ceramic Materials |
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| Huang Anbing, Cui Song.Aluminum Nitride Ceramic Materials[J].Microelectronic Technology,1999(2). |
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| Authors: | Huang Anbing Cui Song |
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| Abstract: | This Paper introduces essential techniques of manufacturing AlN ceramic substrates, as well as trend of AlN ceramic package at home and abroad. Developing trends ofAlN ceramic package is also described. |
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| Keywords: | AlN Manufacturing techniques Ceramic Package |
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