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Influence of assisted ion energy on surface roughness and mechanical properties of boron carbon nitride films synthesized by DIBSD |
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| Authors: | X.M. Yang X.M. Wu L.J. Zhuge F. Zhou |
| Affiliation: | a Department of physics, Suzhou university, Suzhou215006, China b The Key Laboratory of Thin Films of Jiangsu, Suzhou university, Suzhou215006, China c Analysis and Testing Center, Suzhou university, Suzhou 215006, China d Institute of Bio-inspired structure and surface Engineering Academic of Frontier Science, Nanjing University of Aeronautics and Astronautics, Nanjing210016, China |
| Abstract: | The BCN thin films were produced by dual ion beam sputtering deposition (DIBSD). The influence of assisted ion energy on surface roughness and mechanical properties of BCN films were investigated. The surface roughness was determined by atomic force microscopy (AFM) and the mechanical properties of BCN firms were evaluated by nano-indentation in N2 gas. The composition, structure and chemical bonding of the BCN thin films were analyzed by using energy dispersive spectroscopy (EDS), transmission electron microscopy (TEM), laser Raman spectroscopy and Fourier transform infrared spectroscopy (FTIR). These films appeared as amorphous structure. As a result, the BCN films with the smoothest surface (Ra = 0.35 nm and Rp-v = 4.4 nm) and the highest nano-hardness of 30.1 GPa and elastic modulus of 232.6 GPa were obtained at 200 eV and 12 mA with N2:Ar = 1:1, and the chemical composition of this BCN film was 81 at.% B, 14 at.% C and 5 at.% N. Moreover, several bonding states such as B-N, B-C and C-N were observed in BCN thin films. |
| Keywords: | BCN Surface roughness Nano-hardness Elastic modulus |
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