Atomic oxygen resistant behaviors of Mo/diamond-like carbon nanocomposite lubricating films |
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| Authors: | Li Ji Hongxuan Li Weilong Quan Jianmin Chen Huidi Zhou |
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| Institution: | a State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, People's Republic of China
b Graduate University of Chinese Academy of Science, Beijing 100049, People's Republic of China |
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| Abstract: | Mo doped diamond-like carbon (Mo/DLC) films were deposited on Si substrates via unbalanced magnetron sputtering of molybdenum combined with plasma chemical vapor deposition of CH4/Ar. The microstructure of the films, characterized by transmission electron microscopy and selected area electron diffraction, was considered as a nanocomposite with nano-sized MoC particles uniformly embedded in the amorphous carbon matrix. The structure, morphology, surface composition and tribological properties of the Mo/DLC films before and after the atomic oxygen (AO) irradiation were investigated and a comparison made with the DLC films. The Mo/DLC films exhibited more excellent degradation resistant behaviors in AO environment than the DLC films, and the MoC nanoparticles were proved to play a critical role of preventing the incursion of AO and maintaining the intrinsic structure and excellent tribological properties of DLC films. |
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| Keywords: | Diamond-like carbon Mo doping Nanocomposite Atomic oxygen Tribological properties |
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