Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition |
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Authors: | Jing Li Xiubo Tian Shiqin Yang Paul K Chu |
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Institution: | a State Key Lab of Advanced Welding Production Technology, School of Materials Science & Engineering, Harbin Institute of Technology, Harbin 150001, China b Department of Physics & Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong |
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Abstract: | The influence of radio-frequency (RF) power on the structure and gas permeation through amorphous hydrogenated carbon films deposited on cylindrical polyethylene terephthalate (PET) samples is investigated. The results show that a higher radio-frequency power leads to a smaller sp3/sp2 value but produces fewer defects with smaller size. The permeability of PET samples decreases significantly after a-C:H deposition and the RF only exerts a small influence. However, the coating uniformity, color, and wettability of the surface are affected by the RF power. A higher RF power results in to better uniformity and it may be attributed to the combination of the high-density plasma and sample heating. |
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Keywords: | 81 05 Uw 81 15 Gh 78 30 &minus j |
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