Field emission properties of DLC and phosphorus-doped DLC films prepared by electrochemical deposition process |
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Authors: | Shanhong Wan Liping Wang Junyan Zhang |
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Affiliation: | a State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China b Graduate School of the Chinese Academy of Sciences, Beijing 100039, China |
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Abstract: | Field emission behavior of diamond-like carbon (DLC) and phosphorus-doped DLC (p-DLC) films prepared by electrochemical deposition process was comparatively investigated. It was shown phosphorus incorporation in the DLC film could lower the turn on field from 12 to 9.5 V/μm and increase the current density from 12.6 to 45.7 μA/mm2 under high electric field. And better field emission performance of p-DLC films would be mainly attributed to the influence of the surface morphology and the changes of microstructure due to the phosphorus incorporation. |
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Keywords: | Phosphorus-doped DLC film Electrochemical deposition Field emission behavior |
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