Dose and pressure dependence of silicon microstructure in SF6 gas due to excimer laser irradiation

ArF excimer laser radiation on Si surface at controlled SF₆ atmosphere creates a microstructure whose alteration at various UV doses and SF₆ pressures are investigated in this work. Moreover, a rigorous model has been presented here regarding the experiments based on the micro-fluid mechanical properties of molten silicon layer and the subsequent mechanical wave resonance due to the surface shallow fluid theory. The competitive thermal and non-thermal UV laser interaction with Si and the following heat transfer explains the creation of the self-assembled micro-pillars on Si surface.