One-stage fabrication of sub-micron hydrophilic microchannels on PDMS |
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| Authors: | Zhongkui Wu Hong Chen He Huang |
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| Affiliation: | a School of Materials Science and Engineering, Wuhan University of Technology, 122 Luoshi Rd, Wuhan 430070, China
b State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Rd, Wuhan 430070, China |
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| Abstract: | A sub-micron hydrophilic microchannel was fabricated on poly(dimethylsiloxane) (PDMS) in one step using vacuum ultraviolet light (VUV) lithography in vacuum. The topographies and properties of the irradiated PDMS surface were characterized and analyzed by atomic force microscopy (AFM), and the chemical composition changes on VUV-treated PDMS analyzed by X-ray photoelectron spectroscopy (XPS). The hydrophilic stability of irradiated PDMS surface was studied by static water contact angle. As demonstrated, the hydrophilicity on surface of PDMS microchannel can be kept for a longer term even three months after the treatment. |
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| Keywords: | Fabrication Hydrophilic Microchannel PDMS Thin films VUV Atomic force microscopy |
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