|
|||||
|
|
Pulsed-laser deposition of smooth thin films of Er, Pr and Nd doped glasses |
|
| Authors: | G. Epurescu A. Vlad M.A. Bodea O. Dumitrescu M. Elisa J.D. Pedarnig M. Filipescu A.C. Galca M. Dinescu |
| Affiliation: | a National Institute for Laser, Plasma and Radiation Physics, Atomistilor 409, P.O. Box MG 16, RO- 77125, Bucharest-Magurele, Romania b Institut für Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040 Linz, Austria c National Institute for Optoelectronics INOE 2000, Atomistilor 1, P.O. Box MG 05, 077125 Bucharest-Magurele, Romania d University Politehnica of Bucharest, Faculty of Industrial Chemistry, Science and Engineering of Oxide Materials Department, Polizu Str. 1, sect. 1, Bucharest, Romania e National Institute of Glass, Department for Laser Glass Technology, 47 Th. Pallady Str., Sect.3, Bucharest, Romania f National Institute of Materials Physics, Atomistilor 105bis, P.O. Box MG 07, RO- 77125, Magurele, Romania |
| Abstract: | Thin films of complex oxides have been obtained by pulsed-laser deposition (PLD) from glass targets belonging to the system Li2O-Al2O3-P2O5-(RE)2O3, with RE = Nd, Pr, Er. The films were deposited on quartz, silicon and ITO/glass substrates using a F2 laser (λ = 157 nm, ι ≈ 20 ns) for ablation in vacuum. The structural, morphological and optical properties of the oxide films were investigated through IR and UV-VIS spectroscopy, Atomic Force Microscopy (AFM), Scanning Electron Microscopy, Energy Dispersive X-ray Spectroscopy (SEM-EDX) and Spectroscopic Ellipsometry. The laser wavelength was found to be the key parameter to obtain thin films with very smooth surface. In this way new possibilities are opened to grow multilayer structures for photonic applications. |
| Keywords: | Phosphate glasses PLD Rare earth Photonic structures |
| 本文献已被 ScienceDirect 等数据库收录！ | |