Highly oriented crystalline Er:YAG and Er:YAP layers prepared by PLD and annealing |
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Authors: | Jan Remsa Miroslav Jelinek Tomáš Kocourek Ji?í Oswald Marian ?erňanský Michal Jelínek |
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Institution: | a Institute of Physics ASCR, v. v. i., Na Slovance 2, Prague 8, 182 21, Czech Republic b Czech Technical University, Faculty of Biomedical Engineering, nam. Sitná 3105, Kladno 272 01, Czech Republic c International Laser Centre, Ilkovicova 3, Bratislava, 812 19, Slovak Republic d Czech Technical University, Faculty of Electrical Engineering, Technická 2, 166 27 Prague 6, Czech Republic |
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Abstract: | High quality, thick, highly oriented crystalline thin films of Yttrium Aluminum Garnet (Y3Al5O12) and Yttrium Aluminum Perovskite (YAlO3) doped with Erbium were prepared by pulsed laser deposition. Samples were created in vacuum or oxygen environment. Depositions were arranged at room temperature, or at high substrate temperatures ranging from 800 to 1100 °C. Amorphous layers were annealed by laser, or in oven (argon flow, temperatures in range from 1200 to 1400 °C). Fused silica and sapphire (0 0 0 1) were used as substrates. Properties of films were characterized by X-ray diffraction, atomic force microscopy, and by photoluminescence measurement. Size of crystalline grains was in the range 116-773 nm. Thickness of layers was up to 17 μm. |
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Keywords: | Er:YAG Thin films Waveguides PLD Laser |
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