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Assessment methodology of the lateral migration component in data retention of 3D SONOS memories
Institution:1. Institute of Microelectronics, Tsinghua University, 100084 Beijing, China;2. IMEC, B-3001 Leuven, Belgium;1. STMicroelectronics, 850, rue Jean Monnet, 38926 Crolles Cedex, France;2. Laboratory of Computer Sciences, Paris 6 (LIP6), Systems On Chips Department, UPMC University, 4 place Jussieu, 75252 Paris Cedex 05, France;1. Departament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, Cerdanyola del Valles, Spain;2. Departamento de Electricidad y Electrónica, Universidad de Valladolid, Valladolid, Spain;3. Department of Chemistry, University of Helsinki, Helsinki, Finland;1. Department of Electric and Information Engineering (DIEI), University of Cassino and Southern Lazio, Via G. Di Biasio, 43, 03043 Cassino, FR, Italy;2. Fairchild Semiconductor GmbH, 85609 Aschheim/Munich, Germany;1. Freescale Semiconducteurs France SAS, Toulouse Product Analysis Lab, 134 avenue du Général Eisenhower, B.P. 72329, 31023 Toulouse Cedex, France;2. Freescale Semiconductor Inc, 1300 North Alma Road, 85224 Chandler, AZ, USA;1. School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea;2. Research & Development Division, SK Hynix Semiconductor Inc, Icheon, Republic of Korea
Abstract:A new procedure to assess the impact of lateral charge migration from the overall retention transient is developed. This experimental procedure is designed to be applied on any 3D NAND string, and does not require devices specifically designed; this allows to assess the impact of lateral migration in realistic conditions. The experimental procedure relies on comparing retention loss of a standard sample with a “control sample” not suffering from lateral migration, thanks to a pre-conditioning operation. The pre-conditioning procedure to obtain the control samples is discussed in detail and demonstrated through measurements and simulations.
Keywords:Charge trapping memories  3D-SONOS  Retention  Lateral migration  Retention modeling  Reliability
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