X-ray scattering by porous silicon modulated structures |
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| Authors: | A A Lomov V I Punegov V A Karavanskii A L Vasil’ev |
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| Institution: | 1.Institute of Physics and Technology,Russian Academy of Sciences,Moscow,Russia;2.Komi Research Center, Ural Branch,Russian Academy of Sciences,Syktyvkar,Russia;3.Prokhorov General Physics Institute,Russian Academy of Sciences,Moscow,Russia;4.Shubnikov Institute of Crystallography,Russian Academy of Sciences,Moscow,Russia |
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| Abstract: | A multilayered porous structure formed as a result of the anodization of a Si(111)(Sb) substrate in an HF:C2H5OH (1: 2) solution with a periodically alternating current has been investigated by high-resolution X-ray diffraction. It
is established that, despite 50% porosity, a thickness of 30 μm, and significant strain (4 × 10−3), the porous silicon structure consists mainly of coherent crystallites. A model of coherent scattering from a multilayered
periodic porous structure is proposed within the dynamic theory of diffraction. It is shown that the presence of gradient
strains of 5 × 10−4 or higher leads to phase loss upon scattering from porous superlattices and the suppression of characteristic satellites
in rocking curves. |
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