| 共振隧穿二极管的力电耦合特性 |
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| 引用本文： | 仝召民,薛晨阳,林沂杰,陈尚.共振隧穿二极管的力电耦合特性[J].半导体学报,2008,29(10). |
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| 作者姓名： | 仝召民 薛晨阳 林沂杰 陈尚 |
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| 作者单位： | 中北大学电子测试技术国家重点实验室中北大学仪器科学与动态测试教育部重点实验室,太原,030051 |
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| 基金项目： | 国家自然科学基金，教育部跨世纪优秀人才培养计划 |
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| 摘 要： | 报道了微结构中共振隧穿二极管(RTD)的压阻效应.分析并加工了四梁结构,其中RTD置于应力敏感区.沿110]晶向和110]晶向的应力导致RTD电流-电压曲线的改变,即介观压阻变化,尤其是在微分负阻(NDR)区.采用不同测试方法,研究了RTD的力电耦合特性,并获得了较相近的压阻系数为10-9Pa-1.
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| 关 键 词： | 压阻效应 RTD NDR)力电耦合 |
Mechanic-Electric Coupling Characteristics of a Resonant Tunneling Diode |
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| Tong Zhaomin,Xue Chenyang,Lin Yijie,Chen Shang.Mechanic-Electric Coupling Characteristics of a Resonant Tunneling Diode[J].Chinese Journal of Semiconductors,2008,29(10). |
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| Authors: | Tong Zhaomin Xue Chenyang Lin Yijie Chen Shang |
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| Abstract: | This paper reports the piezoresistive effect of a resonant tunneling diode (RTD) in a microstructure. The fourbeam structure is analyzed and fabricated by positing RTDs at the stress sensitive regions. Stress along the 110] orientation and 110] orientation induces a change in the RTD's current-voltage (I-V) curves,I, e. ,the meso-piezoresistance variety,mainly in its negative different resistance (NDR) region. By different methods,the mechanic-electric coupling characteristic of RTD is studied and the consistent 10-9 Pa-1 piezoresistive coefficients are discovered. |
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| Keywords: | piezoresistive effect RTD NDR mechanic-electric coupling |
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