Effect of temperature on the sputtering of surface metallic clusters |
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| Authors: | E V Pugina G V Kornich G Betz |
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| Institution: | 1.Zaporozh’e National Technical University,Zaporozh’e,Ukraine;2.Institut für Allgemeine Physik,Technische Universit?t Wien,Wien,Austria |
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| Abstract: | Sputtering of a cluster of 75 copper atoms from a copper-substrate surface by 200-eV argon ions is simulated using a molecular-dynamics method for target equilibrium temperatures of 0, 300, and 500 K. The sputtering coefficients of the substrate and the cluster and the angular and energy distributions of the sputtered atoms are studied. The mechanisms behind the influence of the thermal atomic vibrations on the sputtering yield of surface metallic clusters are discussed. |
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