Solution of the inverse problem for reconstructing the real structure of materials from the data of different X-ray methods

A software program has been developed for joint solution of the inverse problem on the basis of the X-ray diffractometry and reflectometry data. A system of basic objects supporting some functions of automatic data flow processing in the program and oriented to mathematical calculations has been created. It is shown by the example of experimental data for an In _x Ga_{1 ? x} As-In _y Al_{1 ? y} As/InP(001) sample that joint fitting of X-ray diffractometry and reflectometry curves makes it possible to reconstruct the model parameters of a multilayer with smaller rms errors. The data were processed taking into account the angular dependences of the background intensity and the aperture factors stemming from the geometry of the experiment.